SOLAR INSPECTION SYSTEMS
From silicon to solar modules: Intego offers inspection systems for all production steps
CERAMICS & GLASS INSPECTION SYSTEMS
Inclusions, cracks, geometry measurements: quality control in ceramics and glass production is crucial for flawless parts
PLASTICS INSPECTION SYSTEMS
Automotive or medical engineering: Intego has many years of experience in inspection technologies for plastic products
METAL INSPECTION SYSTEMS
Surface inspection or measurement of grooves: Convince yourself of our solutions
SEMICONDUCTOR INSPECTION SYSTEMS
High throughput detection of surface, material and process defects for bare, epitaxial, patterned and diced wafers More...
ELECTRONIC INSPECTION SYSTEMS
Lock-in thermography shows defects and material properties below the visible surface
The combination of complex camera technology and automation allows new solutions in industrial production
Intego is an innovative medium-sized company located in Erlangen, Germany. Together with our team we develop and manufacture complex inspection systems for our customers worldwide.
In the production of epitaxial layers, a variety of different defects can occur due to imperfect substrate quality, process-related contamination and the coating process. For their safe and reliable detection, various sophisticated inspection methods are available. In particular, photoluminescence and DIC microscopy enable the reliable detection of the critical crystallographic defects, which in certain cases can lead to component failure if not detected in time.
Detection of exposure and implantation errors as well as the control of overlay offset and CD values are of crucial importance for the complex manufacturing of microelectronic products. Intego's inspection and measurement systems are also supported by its proprietary CAD based defect detection and wafer yield prediction software. In addition to the classical evaluation algorithms, advanced neural networks for defect detection and classification are also available.
If you require an individual solution, Intego offers free-of-charge feasibility studies based on sample parts. The prepared study will include a system design with draft specifications and a price estimate. Do not hesitate to contact us directly.
Dr. Steffen Oppel
+49 9131 61082-230