SOLAR INSPECTION SYSTEMS
From silicon to solar modules: Intego offers inspection systems for all production steps
CERAMICS & GLASS INSPECTION SYSTEMS
Inclusions, cracks, geometry measurements: quality control in ceramics and glass production is crucial for flawless parts
PLASTICS INSPECTION SYSTEMS
Automotive or medical engineering: Intego has many years of experience in inspection technologies for plastic products
METAL INSPECTION SYSTEMS
Surface inspection or measurement of grooves: Convince yourself of our solutions
SEMICONDUCTORS INSPECTION SYSTEMS
Short inspection times and microscope techniques enable a 100% production control More...
ELECTRONIC INSPECTION SYSTEMS
Lock-in thermography shows defects and material properties below the visible surface
The combination of complex camera technology and automation allows new solutions in industrial production
Intego is an innovative medium-sized company located in Erlangen, Germany. Together with our team we develop and manufacture complex inspection systems for our customers worldwide.
Our automated inspection systems ensure high standards and the quality of products in the semiconductor industry. Testing the basic substrates and intermediate products for defects is an important step in precisely characterizing component properties and manufacturing processes. A high reproducibility and absolute accuracy of the measurements is emphasized. The measurements are carried out continuously and include live statistics.
The microscope scanner for testing LEDs, OLEDs, MEMS is based on an automated platform that enables high throughputs. Typical resolutions of 0.5 μm to 5 μm are achieved in combination with lighting techniques from the UV-VIS-IR spectral range.
Intego offers Inspection solutions for various semiconductor compounds (SiC, GaAs, etc.). In this context, a novel photoluminescence scanner for SiC wafers was developed. Critical defects such as stacking defects (SDs) and basal dislocations (BPDs) in substrates and epiwafers can thus be reliably detected. Photoluminescence is also used in our MODULUM system for wafer inspection (Si, SiC, GaAs, GaN, Ge).
• Inspection of LEDs, OLEDs, MEMS• High throughput, inline process
• Inspection of SiC wafer• Characterization of crystallographic defects