Taurus

Our inspection system TAURUS is used for detection of cracks and inclusions in complete wafer stacks. The lateral direction of view (parallel to wafer surface) has the advantage that this concept is not disturbed by the natural structure of grain boundaries. With the help of the exact determination of the positions of defect wafers in a stack they can be separated afterwards easily. 

Features

• Lateral infrared transmission through wafers in a stack
• Also works for cells
• Detection of microcracks and inclusions/impurities
• 3D-reconstruction of defects in a stack
• Positions of defect wafers are stored for a later sorting out
• Automated versions for inspection of up to ten stacks at a time available

Benefits

• Reliable detection of microcracks
• Ensure quality prior to wafer loading
• Reduce breakage rate of production lines
• Payback time less than six months possible
  

Data Sheet TAURUS Microcracks in stacks